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发明名称
VACUUM TREATMENT METHOD
摘要
申请公布号
JPH07273099(A)
申请公布日期
1995.10.20
申请号
JP19950050780
申请日期
1995.03.10
申请人
HITACHI LTD
发明人
KAKEHI YUTAKA;NAKAZATO NORIO;FUKUSHIMA YOSHIMASA;HIRATSUKA YUKIYA;SHIBATA FUMIO;YAMAMOTO NORIAKI;TSUBONE TSUNEHIKO
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/68;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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