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发明名称
HIGH-FREQUENCY POWER SOURCE FOR PLASMA GENERATION
摘要
申请公布号
JPH07272898(A)
申请公布日期
1995.10.20
申请号
JP19940060718
申请日期
1994.03.30
申请人
JEOL LTD
发明人
KATO TSUTOMU
分类号
H05H1/46;C23C16/50;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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