| 摘要 |
PURPOSE:To conduct uniform spray development or paddle development without causing the temp. drop of a developer or nonuniformity in liq. crystals by composing of the developer of a bipolar aprotic polar solvent, an ester and water. CONSTITUTION:This developer consists of 60-85wt.% bipolar aprotic polar solvent, 5-30wt.% ester and 5-10wt.% water. In this case, N-methylpyrrolidone, N,N-dimethylacetamide, N,N-dimethylformamide, sulfolane, N,N- diethylformamide, etc., are exemplified as the bipolar aprotic polar solvent, but other materials can be used as well. Ehylene carbonate, propylene carbonate, ethyl lactate, ethyl pyruvate, propylene glycol monomethyl ether acetate, methyl-3-methoxypropionate, ethyl-3-ethoxypropionate, butyl acetate, etc., are preferably exemplified as the esters to be used. |
