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发明名称
SEMICONDUCTOR WAFER RECOGNITION DEVICE
摘要
申请公布号
JPH07272989(A)
申请公布日期
1995.10.20
申请号
JP19940060884
申请日期
1994.03.30
申请人
MATSUSHITA ELECTRON CORP
发明人
YANO TOSHIHIKO;FUJIWARA KAZUO
分类号
H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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