Micro-mechanical electrostatic relay with spiral contact spring bars

摘要

The armature spring tongue (20) is formed by selective etching of a doped Si layer with an oxide and a nitride layer on its underside producing compressive and expansive tensions respectively.The contact piece (7) is supported on a rotationally symmetric contact spring region (21) surrounded by resilient bars (22) like the spokes of a sun wheel bounded by arcuate slots (23) extending over an angle of about 200 deg. The overlap is sufficient to guarantee twisting of the bars by axial movement of the contact piece.