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发明名称
PROCESS OF MANUFACTURE OF FIELD-EFFECT TRANSISTOR WITH SUBMICRONIC SHOTTKY-BARRIER GATE
摘要
申请公布号
RU2046453(C1)
申请公布日期
1995.10.20
申请号
SU19925066428
申请日期
1992.09.07
申请人
AKTSIONERNOE OBSHCHESTVO OTKRYTOGO TIPA "PLANETA"
发明人
MOZGUNOV ALEKSANDR FEDOROVICH;ROMANOV VADIM LEONIDOVICH;CHERNYAVSKIJ ALEKSANDR ALEKSANDROVICH
分类号
H01L21/338;(IPC1-7):H01L21/338
主分类号
H01L21/338
代理机构
代理人
主权项
地址
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