| 摘要 |
<p>This invention is a beam profiler comprising: an intensity modifier (34) constructed and arranged to separately modify the intensity profile of different sub-beam portions of an initial beam to thereby create respective sub-beams each having a respective predetermined modification; and a sub-beam directing optical system constructed and arranged to direct the multiple sub-beams along respective sub-beam beam paths that substantially overlap in an overlap plane (40), whereby a resulting beam of radiation is created at the overlap plane that has an intensity profile equal to the optical incoherent summation of the predetermined intensity profiles of said overlapping sub-beams. The intensity modifier preferably comprises an array of intensity modifying profiling elements (36) disposed across the initial beam each producing a corresponding sub-beam.</p> |
