Microelectronic circuit conductor path connection system
摘要
The connection system is used to provide vertical connections between conductor paths in different metallisation layers of the microelectronic circuit, via a material reservoir in addition to the material of the conductor paths, providing a circuit path between the latter. Pref. the circuit path provided by the material reservoir is electrically connected to the conductor paths in the vertically spaced metallisation planes by contacts formed via a laser beam, the vertical contact structure pref. incorporated in a redundant bus system.