发明名称 SEMICONDUCTEUR STRAIN-MEASURING CONVERTER
摘要 The proposed semiconductor strain-measuring converter is based on a silicon crystal in the form of an n-type conducting chip (1), the primary working surface (2) of which is provided with p-type strain resistors (3, 4, 5, 6) electrically connected into a bridge circuit and configured in pairs above zones of parallel depressions (9, 10) which extend across the entire width of the chip (1) on the side of its second (11) surface opposite the first working surface. Pairs of strain resistors (3, 4; 5, 6) are mounted above the area of each depression (9, 10), the strain resistors being associated with opposing limbs of the bridge circuit, and all the strain resistors (3, 4, 5, 6) are configured parallel to each other.
申请公布号 WO9528007(A1) 申请公布日期 1995.10.19
申请号 WO1994RU00078 申请日期 1994.04.11
申请人 ZAKRYTOE AKTSIONERNOE OBSCHESTVO "INNOVATSIONNY TS;ZIMIN, VIKTOR NIKOLAEVICH;SALAKHOV, NADIR ZEFEROVICH;SHABRATOV, DENIS VLADIMIROVICH;SHELEPIN, NIKOLAI ALEXEEVICH;NEBUSOV, VALERY MIKHAILOVICH;SINITSIN, EVGENY VLADIMIROVICH 发明人 ZIMIN, VIKTOR NIKOLAEVICH;SALAKHOV, NADIR ZEFEROVICH;SHABRATOV, DENIS VLADIMIROVICH;SHELEPIN, NIKOLAI ALEXEEVICH;NEBUSOV, VALERY MIKHAILOVICH;SINITSIN, EVGENY VLADIMIROVICH
分类号 G01P15/12;H01L29/84;(IPC1-7):H01L29/84 主分类号 G01P15/12
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