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发明名称
NOZZLE ASSEMBLY FOR SEMICONDUCTOR COATING APPARATUS
摘要
申请公布号
KR950009000(Y1)
申请公布日期
1995.10.18
申请号
KR19920014344U
申请日期
1992.07.31
申请人
LG SEMICONDUCTOR CO., LTD.
发明人
CHONG, TAE - SONG;YUN, HYONG - HUN
分类号
H01L21/48;(IPC1-7):H01L21/48
主分类号
H01L21/48
代理机构
代理人
主权项
地址
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