SEMICONDUCTOR MEMORY DEVICE HAVING A MICRO CUP

摘要

a conduction layer of a first electrode formed in a limited area on a substrate; a dielectric layer formed on the first electrode; and a second electrode formed on the dielectric layer, wherein the conduction layer includes a plurality of micro-caps on the surface thereof. The conduction layer is a polycrystal silicon layer and each of the micro-cap is an epitaxial layer.