X-ray mask structure, and x-ray exposure process.

摘要

The present invention provides an X-ray mask structure comprising an X-ray transmissive membrane, an X-ray absorber held on said X-ray transmissive membrane, and a holding frame that holds said X-ray transmissive membrane, wherein; said X-ray transmissive membrane comprises a layer of aluminum nitride; and said X-ray absorber comprises a nitride of heavy metal. a