METHOD OF MANUFACTURING FINE CERAMIC PARTICLES AND APPARATUS THEREFOR.

摘要

The present invention provides a method of manufacturing fine ceramic particles, comprising the steps of supplying a raw gas or raw liquid droplets to a reaction space provided in an annular portion between the stationary outer cylinder and the rotatable inner cylinder of a double coaxial cylindrical reactor, and subjecting the raw gas or raw liquid droplets to a reaction in the reaction space while rotating the inner cylinder. The present invention also provides an apparatus used to practice this method. A Taylor vortex is employed as a fluid flow in a CVD reaction zone or a thermal decomposition reaction zone. Consequently, the temperature distribution in the vortex, the concentration distribution of the reaction gas or concentration distribution in terms of the number of liquid droplets, and the residence time of formed fine particles confined in the vortex become uniform, and uniform fine ceramic particles can be obtained with a high yield. <IMAGE>