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发明名称
High purity hydroxy-terminated phenyl ladder polysiloxane and method for producing the same.
摘要
申请公布号
EP0436844(B1)
申请公布日期
1995.10.18
申请号
EP19900123557
申请日期
1990.12.07
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
YAMAMOTO, SHIGEYUKI, MITSUBISHI DENKI K.K.;ADACHI, HIROSHI, MITSUBISHI DENKI K.K.
分类号
H01L21/768;C08G77/06;C08G77/16;C08G77/20;C08G77/22;C08G77/34;G03F7/075;H01L21/312;H01L23/522;(IPC1-7):C08G77/06
主分类号
H01L21/768
代理机构
代理人
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地址
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