WASTE GAS TREATING AGENT AND TREATMENT OF WASTE GAS WITH SAME

摘要

PURPOSE:To relatively easily treat nitrogen trifluoride-contg. waste gas without requiring a high temp. or disposal after treatment by packing a treating agent based on a surface-fluorinated metal into a treatment column and passing the waste gas through the column. CONSTITUTION:A metal such as Mn, Fe of a group IB or IIB of the Periodic Table is crushed by stamp crushing method and the resultant metallic particles are fluorinated by contact with a gaseous fluorinating agent such as gaseous fluorine or nitrogen trifluoride to form fluorinated coating films. The particles are then packed into a column with a gas introducing hole and gas exhausting holes in both ends and waste gas contg. nitrogen trifluoride to be treated is passed through the column. The particles are relatively easily handled, the waste gas containing NF3 gas is treated without requiring a high temp. for a reaction and the treated waste gas does not contain chemical species requiring subsidiary treatment.