| 摘要 |
PURPOSE:To clean a vacuum tunnel to be used for a magnetically levitated conveyor, etc., without disassembling it by using this device. CONSTITUTION:The inner wall of a vacuum vessel 1 deposited with a contaminant 2 is irradiated with ion or electron 5 to charge the contaminant 2, a current is applied through the inner wall of the vessel 1 to exert a repulsion on the charged contaminant 2 which is thereby released from the inner wall, and the contaminant 2 released from the inner wall is discharged. |
