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发明名称
TEST METHOD FOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH07260886(A)
申请公布日期
1995.10.13
申请号
JP19940049454
申请日期
1994.03.18
申请人
FUJITSU LTD
发明人
IWAMOTO NAOMI
分类号
G01R31/28;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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