| 摘要 |
<p>An appts. for confining and filtering leaked gas comprises: (a) a gas collector which can be fixed at one end to the gas leakage point; (b) a suction device for drawing the leaked gas through the collector; and (c) a container fixed to the other end of the gas collector and contg. a filtering medium. Pref. the filtering medium comprises high specific surface carbon impregnated with an alkali metal hydroxide or copper oxides, high specific surface alumina impregnated with an alkali metal hydroxide or potassium permanganate, barium oxide pellets and/or calcium oxide pellets. Also claimed is a gas leakage confinement and filtration process. The leaked gas may be chlorine, dichlorosilane, boron trichloride, hydrogen chloride, silicon tetrachloride, trichlorosilane, arsine, mono-germane, hydrogen sulphide, hydrogen selenide, phosphine, boron trifluoride, hydrogen fluoride, silicon tetrafluoride, tungsten hexafluoride, or even a gaseous organometallic mixt.. The suction device is pref. an air-operated aspirator fed with a controlled flow of non-flammable gas (pref. N2, Ar or He) for controlling leaked gas suction through the gas collector to ensure purification of the leaked gas to a predetermined level.</p> |
