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发明名称
TESTING CARRIER FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH07263504(A)
申请公布日期
1995.10.13
申请号
JP19940048850
申请日期
1994.03.18
申请人
FUJITSU LTD
发明人
MARUYAMA SHIGEYUKI
分类号
H01L21/66;G01R1/04;G01R31/28;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
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地址
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