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发明名称
Surface treatment of silicon carbide
摘要
申请公布号
US3078219(A)
申请公布日期
1963.02.19
申请号
US19580771380
申请日期
1958.11.03
申请人
WESTINGHOUSE ELECTRIC CORPORATION
发明人
CHANG HUNG-CHI
分类号
C01B31/36;C25F3/12;H01L21/04
主分类号
C01B31/36
代理机构
代理人
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地址
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