| 摘要 |
PURPOSE:To obtain a thin film semiconductor solar cell provided with an improved back reflecting layer composed of a smooth metal layer and a transparent layer of texture structure. CONSTITUTION:An aluminum layer 102 which contains at least one element out of Si, Cu, Zn, and Mn is formed on a substrate 101, then a transparent layer 103 is formed thereon to form a back reflecting layer whose surface is of texture structure where irregularities are disposed at a proper pitch, and a thin film semiconductor junction 104 and a transparent electrode 108 are provided thereon. It is preferable that the surface of the thin film semiconductor junction 104 has a texture structure equal to that of the back reflecting layer. By this setup, a back reflecting layer of this constitution is high in reflectance to solar rays and has a high light trapping effect, so that a solar cell of this constitution is improved in conversion efficiency. Moreover, aluminum atoms are less diffused into a transparent layer and a semiconductor layer, so that the transparent layer and a thin film semiconductor junction are less changed in characteristics and enhanced in reliability. |
