FORMATION OF CORNER WAVEGUIDE ELEMENT

摘要

PURPOSE:To provide a corner waveguide element of a reflection mirror type which is low in reflection loss even if either of a waveguide forming stage and a reflection mirror part forming stage is carried out first. CONSTITUTION:The pattern 4A of the bent waveguide part is formed by etching a resist pattern formed as a pattern to graphically OR the pattern 6A of the bent waveguide and the pattern 7A assembling the reflection mirror part having a shape resembling the shape of the reflection mirror part 3A as an etching mask. Then, the pattern of the bent waveguide part is formed as the pattern to be graphically ORed, thereby, the element is not subjected to damage by the irregular reflection of secondary ions during the time of etching even if either of the waveguide forming stage or the reflection mirror part forming stage is executed first.