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发明名称
SLIT DIRECTION SWITCHING MECHANISM
摘要
申请公布号
JPH07260695(A)
申请公布日期
1995.10.13
申请号
JP19940053712
申请日期
1994.03.24
申请人
NIKON CORP
发明人
IWASAKI MASAYA
分类号
G01B11/24;G01N21/84;(IPC1-7):G01N21/84
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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