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发明名称
FLAW DETECTION SYSTEM
摘要
申请公布号
JPH07260705(A)
申请公布日期
1995.10.13
申请号
JP19940098396
申请日期
1994.05.12
申请人
FUOTONETSUKUSU LTD
发明人
HORUBURUTSUKU BAATON MAAKU
分类号
G01B11/30;B05C11/00;G01N21/88;G01N21/956;G06F17/14;H01L21/66;(IPC1-7):G01N21/88
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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