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发明名称
LOGICAL CELL DIVISION PROCESSING METHOD IN SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH07262264(A)
申请公布日期
1995.10.13
申请号
JP19940054289
申请日期
1994.03.25
申请人
TOSHIBA CORP
发明人
UEDA TOSHIAKI
分类号
H01L21/822;G06F17/50;H01L21/82;H01L27/04;(IPC1-7):G06F17/50
主分类号
H01L21/822
代理机构
代理人
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