| 摘要 |
PURPOSE:To easily detect a work touch by using a linear motor without forming another structure of a bonding arm and a rocker arm to cope with acceleration by detecting the touch with a soft treatment such as programming, etc., without using a proximity sensor, a speed detector, etc. CONSTITUTION:The wire bonding apparatus comprises a bonding arm 20 having a capillary 23 at one end and a coil 25 rockable in an air gap of a magnetic circuit 26 at the other end and a linear motor 24, and position detecting means for detecting a position of the capillary 23 by detecting a rocking angle of the arm 20. Touch of a work can be detected by comparing a present position of the capillary detected by the detecting means with a command position from control means by the control means for instructing a command to the motor based on data from the detecting means. |
