CONTROL SYSTEM AND METHOD

摘要

Temperatures measured by temperature sensors corresponding to a plurality of heaters are normalized according to a reference target temperature to obtain a reference value. The deviation of each of the normalized temperatures from the reference value is calculated, and it is differentiated with time. A correction gain is calculated on the basis of the deviations and the differentiated deviations. The deviations of measured temperatures from their respective reference target temperatures are normalized according to the reference target temperature. Degree of settling is calculated on the basis of these normalized deviations. Corrective values are calculated on the basis of respective gains and the degree of settling, respectively. The target temperatures are calculated by correcting the reference target temperature according to the corrective values.