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发明名称
Vorrichtung zum Ein- und Ausschleusen scheibenförmiger Substrate.
摘要
申请公布号
DE59300562(D1)
申请公布日期
1995.10.12
申请号
DE19935000562
申请日期
1993.06.24
申请人
LEYBOLD AG, 63450 HANAU, DE
发明人
KEMPF, STEFAN, D-8755 ALZENAU, DE
分类号
C23C14/56;F16H25/16;H01L21/00;(IPC1-7):C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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