发明名称 |
CRYSTAL MANUFACTURE METHOD |
摘要 |
PURPOSE:To provide a crystal manufacturing method for excellently making a light-emitting element from AlGaInN crystal. CONSTITUTION:The {1-100} or {11-20} face of sapphire is used as a substrate crystal and a ZnO layer 12 is put on it and successively AlGaIn series hetero structures 13 to 17 are grown, and the ZnO layer is dissolved by an acid to separate AlGaInN heterocrystal and the herterocrystal is split. Thereby, the excellent split plane which is essential to form a Fabry-perot cavity is obtained. |
申请公布号 |
JPH07263809(A) |
申请公布日期 |
1995.10.13 |
申请号 |
JP19940051540 |
申请日期 |
1994.03.23 |
申请人 |
HITACHI LTD |
发明人 |
MINAGAWA SHIGEKAZU;TANAKA TOSHIAKI;ISHITANI YOSHIHIRO;OTOSHI SO |
分类号 |
H01L33/10;H01L33/16;H01L33/28;H01L33/32;H01S5/00;H01S5/323 |
主分类号 |
H01L33/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|