| 摘要 |
PURPOSE:To provide a multi-axial gas rate sensor which can simultaneously detect angular velocities acting in optional directions, with a superior detecting accuracy and an excellent reliability. CONSTITUTION:By using a micromachining process for manufacture of semiconductors, heat wires of heat-sensitive resistance elements HW-l, HW-r for detection of an angular velocity in a yaw direction, heat wires of heat- sensitive resistance elements HW-u, HW-d for detection of an angular velocity in a pitch direction, penetrating parts 3B, 4B constituting a gas flow path, a path cover 2B and a path bottom part 5B constituting a case of the sensor, etc., are formed to constitute the sensor.
|
