发明名称 |
Solar cells utilizing pulsed-energy crystallized microcrystalline/polycrystalline silicon |
摘要 |
A process for producing multi-terminal devices such as solar cells wherein a pulsed high energy source is used to melt and crystallize amorphous silicon deposited on a substrate which is intolerant to high processing temperatures, whereby to amorphous silicon is converted into a microcrystalline/polycrystalline phase. Dopant and hydrogenization can be added during the fabrication process which provides for fabrication of extremely planar, ultra shallow contacts which results in reduction of non-current collecting contact volume. The use of the pulsed energy beams results in the ability to fabricate high efficiency microcrystalline/polycrystalline solar cells on the so-called low-temperature, inexpensive plastic substrates which are intolerant to high processing temperatures.
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申请公布号 |
US5456763(A) |
申请公布日期 |
1995.10.10 |
申请号 |
US19940219487 |
申请日期 |
1994.03.29 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
KASCHMITTER, JAMES L.;SIGMON, THOMAS W. |
分类号 |
H01L31/0392;H01L31/18;(IPC1-7):H01L31/04;H01L31/036 |
主分类号 |
H01L31/0392 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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