Elektronisches Bauteil mit eingebauter Induktivität

摘要

An electronic component having a built in inductor comprises an insulating body 26 containing a conductor film 15 in close proximity to a ferromagnetic film 27A or 27B. Additional ferromagnetic films 28 may be arranged on other sides of the conductor film within the body 15. A conductor film is formed by deposition of two metal layers on a lubricated glass substrate and patterned by photolithography. The ferromagnetic films, which may contain Ni, Fe or Co, are formed similarly on separate glass substrates. The patterned films are transferred onto an alumina green sheet and covered with further alumina sheets. The whole is compressed and fired to sinter the ceramic body 26 and alloy the metal layers. <IMAGE>