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发明名称
Verfahren zur Herstellung eines Halbleiterbauelementes.
摘要
申请公布号
DE69112545(D1)
申请公布日期
1995.10.05
申请号
DE1991612545
申请日期
1991.09.04
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA, JP
发明人
NISHIGUCHI, MASANORI, C/O YOKOHAMA WORKS OF, YOKOHAMA-SHI, KANAGAWA, JP
分类号
H01L21/304;H01L21/306;H01L21/78;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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