Micro=mechanical actuator for handling miniaturised components

摘要

The invention concerns a micromechanical actuator having a piston which is movable in a channel and on which a pressurizing medium acts from one side from a pressure chamber. The actuator comprises a flat housing which is mounted rigidly on a substrate plate and has a channel in which a piston can move. At one end the channel leads into a pressure chamber on which a pressure fluid acts. A guide rod is secured on one side of the piston and a piston rod is secured on the other side thereof. A bearing block for guiding the piston on the substrate plate is secured in front of and behind the piston in each case.