发明名称 Method and appts. for production of solder bumps
摘要 The method concerns production of solder bumps on one or several regions of a surface, in particular, electric contact surfaces, according to which solder material is brought into the required locations and melted by high-energy radiation. The method is characterised by the fact that the molten solder,while contracting into a globule as a result of its surface tension, wets a predetermined surface region and produces a bump whose shape is particularly suited for a soldered connection. The appts. includes a source of high-energy radiation, and solder material located in the immediate vicinity of the appropriate surface regions. The solder material is arranged so that a given surface region is wetted when the material is melted by radiation. The solder material is applied in the form of a fine-grained solder paste forming a layer with a thickness of 100-1000 mu m. The appts. includes means for forming a beam of high-energy radiation, as well as means for positioning and/or deflection of the beam. The energy source is laser, in particular, a Nd:YAG laser.
申请公布号 DE19511392(A1) 申请公布日期 1995.10.05
申请号 DE1995111392 申请日期 1995.03.28
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE 发明人 KRABE, DETLEF, DR., 14471 POTSDAM, DE;REICHL, HERBERT, PROF. DR., 14193 BERLIN, DE;WOLF, JUERGEN, DIPL.-ING., 13351 BERLIN, DE
分类号 H01L21/60;H01L23/485;H05K3/34;(IPC1-7):H01L21/60;H01R4/02;B23K1/005 主分类号 H01L21/60
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