发明名称 |
Jig and method for clamp-positioning single crystal ingot. |
摘要 |
A jig and a method are provided for accurately and easily positioning a single crystal ingot with respect to the clamp rotary shafts of a device for grinding the peripheral surface of the ingot. The jig includes male positioning fixtures 10L and 10R and female positioning fixtures 32L and 32R. In the male positioning fixtures, negative-pressure suction cups 105 made of an elastic or viscoelastic material and blocks 101 at the backs of the cups are integrally formed with each other. In the female positioning fixtures, holes 325 are formed at the ends of the clamp rotary shafts 30L and 30R of the grinding device. The male positioning fixtures are accommodated in the holes, and the blocks are fitted into the holes so as to be concentric with the clamp rotary shafts. <IMAGE> |
申请公布号 |
EP0498297(B1) |
申请公布日期 |
1995.10.04 |
申请号 |
EP19920101509 |
申请日期 |
1992.01.30 |
申请人 |
SHIN-ETSU HANDOTAI COMPANY, LIMITED |
发明人 |
IBE, HIROYUKI;NAKATA, TOSIHISA |
分类号 |
B23B23/02;B23Q3/18;B24B5/04;B24B41/06;B24B47/22;C30B33/00 |
主分类号 |
B23B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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