发明名称 Thin film reinforcing structure and method for manufacturing the same
摘要 <p>The invention relates to a reinforcing structure for a thin film, particularly for an ultrathin film permeable to X-ray and ultraviolet radiation, and a method for manufacturing a reinforcing structure for a thin film with a thickness less than 5 micrometers. According to the invention, on the surface of the thin film, there is formed, in a bakeing treatment of at least one step, a reinforcing structure made of some photosensitive material such as polymer.</p>
申请公布号 GB2266787(B) 申请公布日期 1995.10.04
申请号 GB19930009399 申请日期 1993.05.07
申请人 * OUTOKUMPU INSTRUMENTS OY 发明人 VELI-PEKKA * VIITANEN
分类号 G03F7/00;G03F7/09;H01J5/18;H01J47/00;(IPC1-7):G03F7/00 主分类号 G03F7/00
代理机构 代理人
主权项
地址