发明名称
摘要 <p>PURPOSE:To deliver or store a required exposure board quickly and correctly by providing a control means controlling the horizontal and vertical movement of a conveying means based on the storage position information and controlling the movement in the depth direction of a board holding means based on the depth position information. CONSTITUTION:When the identification information of an exposure board to be delivered from a storage shelf is designated by a designating means 65, the storage position information corresponding to the identification information is read out from a storage position memory means 62. A control means 60 controls the horizontal and vertical movement of a conveying means based on the storage position information to convey the exposure board held by a board holding means to the designated position of a storage shelf. The board holding means holds and extracts an exposure board stored at this position. The extracted exposure board is conveyed to a board holder by the conveying means and carried in to the required position of the board holder.</p>
申请公布号 JPH0790884(B2) 申请公布日期 1995.10.04
申请号 JP19890176654 申请日期 1989.07.08
申请人 发明人
分类号 B65H1/28;B65G1/00;B65G1/04;B65G1/07;B65G1/137;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):B65G1/04 主分类号 B65H1/28
代理机构 代理人
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