发明名称 Manufacturing process for obtaining bipolar transistors with controlled storage time.
摘要 A manufacturing process for obtaining integrated structure bipolar transistors with controlled storage time comprises the steps of: in a silicon material (1, 2), forming at least one bipolar transistor occupying a first area (AD) on a first surface of the silicon material (1, 2); covering the first surface of the silicon material (1, 2) with an insulating material layer (5); selectively removing the insulating material layer (5) to open at least one window (6) having a second area (APt) much smaller than the first area (AD) occupied by the bipolar transistor; implanting into the silicon material (1, 2) a medium dose (D) of platinum ions through said window (6); and diffusing into the silicon material (1, 2) the implanted platinum ions to obtain a uniform distribution of platinum inside the transistor. <IMAGE> <IMAGE>
申请公布号 EP0675527(A1) 申请公布日期 1995.10.04
申请号 EP19940830150 申请日期 1994.03.30
申请人 CONSORZIO PER LA RICERCA SULLA MICROELETTRONICA NEL MEZZOGIORNO - CORIMME 发明人 FRISINA, FERRUCCIO
分类号 H01L29/73;H01L21/22;H01L21/331;H01L29/732 主分类号 H01L29/73
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