摘要 |
<p>PURPOSE:To enhance efficiency, uniformity at the time of arraying, reliability of operation, and durability. CONSTITUTION:A first insulation layer 13 is disposed in a portion except for the tip of a projecting emitter 26 having a sharp end provided in on an emitter member layer 1. A gate electrode layer 21 where a portion surrounding the emitter 26 is formed into a cylindrical tapered shape along the circumferential surface of the emitter is superposed on the insulative layer 13. A second insulative layer 22 is mounted on the gate electrode layer 21. An anode electrode layer 23 where a portion surrounding the emitter 26 is formed into a cylindrical tapered shape along the circumferential surface of the emitter is mounted on the second insulative layer 22. At least the circumferential surfaces of the tips of the cylindrical portions in the gate electrode layer 21 and the anode electrode layer 23 are exposed at a solid angle viewed from the tip of the emitter 26.</p> |