| 摘要 |
<p>PURPOSE:To realize stable controllability by providing a means changing a parameter of a robust stabilizing compensation means based on the arithmetic operation of an arithmetic means to the controller. CONSTITUTION:A desired value generating means 16 generates a desired value xr for a relative displacement operation and gives it to a stabilizing compensation means 14. Then a deviation (e) between the desired value xr and an actual relative displacement (x) is fed to a robust compensation device 14. Then a test signal generating means 17 generates a test signal at the initializing state and periodically thereafter and gives the signal to a control system for a stepper. A test output signal detection means 19 detects a test output signal with respect thereto and gives it to an arithmetic means 18. Then the arithmetic means 18 operates a parameter for a stabilization compensation means 15 based on the information and parameter variable means 20, 21 change automatically the parameter for the stabilization compensation means 15. Thus, the ununiformity of the control performance due to position is avoided and stable control performance is realized.</p> |
