发明名称 |
Position detecting system |
摘要 |
A position detecting system includes a light source for producing a light beam for irradiating a reference mark formed on an object which is relatively displaceable relative to the light beam, a detector for detecting a light quantity distribution of the light from the reference mark, and a circuit for comparing a first light quantity distribution at a first position with a second light quantity distribution at a second position spaced from the first position by a predetermined distance, and for determining a reference position of the object on the basis of the comparison.
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申请公布号 |
US5455679(A) |
申请公布日期 |
1995.10.03 |
申请号 |
US19950384221 |
申请日期 |
1995.02.06 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
HOURYU, SAKAE;SAITOH, KENJI |
分类号 |
G03F9/00;(IPC1-7):G01B11/27;G01N21/86 |
主分类号 |
G03F9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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