| 摘要 |
<p>PURPOSE:To provide a device for correcting a foreign matter on a filter capable of correcting the height of the foreign matter occurring on e.g. a color filter to be within a prescribed height. CONSTITUTION:A spindle 61 rotating a working tool 59 is fixed to a fixing base 65 by a piezoelectric element 63. For grinding the foreign matter 57 occurring on the color filter 55 provided on a table 53 by a grinding surface 59b, a position detection part 67 for detecting a position of the end surface 59a of the working tool 59 is provided in the table 53. The output of the position detection part 67 is given to a control part 85, and by giving a signal for driving the piezoelectric element 63 from the control part 85, a distance between the end surface 59a of the working tool 59 and one side surface 55a of the color filter 55 is controlled.</p> |
