DISCHARGE PORT DEVICE OF DEPOSITION CHAMBER,申请号JP19940071517-传众专利搜索

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发明名称	DISCHARGE PORT DEVICE OF DEPOSITION CHAMBER
摘要
申请公布号	JPH07252659(A)	申请公布日期	1995.10.03
申请号	JP19940071517	申请日期	1994.03.16
申请人	FUJIKURA LTD	发明人	OTAKE FUMIO
分类号	B08B17/02;B01J4/00;C03B37/014;C03B37/018;C23C16/44;C23C16/455;(IPC1-7):C23C16/44	主分类号	B08B17/02
代理机构		代理人
主权项
地址

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