| 摘要 |
<p>PURPOSE:To facilitate the formation of scribe lines without defect by forming partial scribe lines in area where a plurality of blocks are in contact with one another and peripheral scribe lines on the periphery of a chip composed of a plurality of blocks, and then forming alignment marks. CONSTITUTION:Partial scribe lines 14 are formed in the boundary of two chips. Peripheral scribe lines 15 can be formed on the periphery of the two chips based on a rectangle composed of four sides. The rectangle is of the same shape both in the vertical direction and in the horizontal direction. For the reason, these scribe lines are formed by forming one rectangle in the vertical direction and in the horizontal direction, respectively, shifting the respective rectangles in the X or Y direction, and copying them. After the formation of the partial and peripheral scribe lines 14, 15, alignment marks 17 are formed by specifying the coordinates of the diagonal position.</p> |
