| 摘要 |
PURPOSE:To provide a photosensitive resin compsn. showing excellent balance in various properties such as sensitivity, resolution, heat resistance, profile, and focus depth. CONSTITUTION:This photosensitive resin compsn. contains a photosensitive agent expressed by formula and a novolac resin. In formula, R1, R2, R8 and R9 are hydrogen, alkyl groups, or the like, R3, R4 and R7 are hydrogen or 1,2- naphthoquinone diazide sulfonyl groups, and R5 and R6 are cycloalkyl groups. |
