发明名称 X-RAY DEVICE
摘要 PURPOSE:To dispense with replacement of an X-ray transmitting film over a long period of time, and enhance operation efficiency by evaporating an evaporating or scattering substance by heating the X-ray transmitting film to capture an evaporating substance and/or a scattering substance of a target material. CONSTITUTION:An X-ray transmitting film 101 of a shielding means 100 is sandwiched and fixed by X-ray transmitting film holding tools 102 and 103 composed of a material having high heat conductivity. A thermocouple 104 to detect a temperature of the film 101 is installed on the holding tool 103, and a heater 105 to heat the film 101 is installed on the holding tool 102. A control means 106 detects the temperature of the film 101 by the thermocouple 104, and controls an electric current quantity to the heater 105 so that saturated vapor pressure of a target material stuck to and accumulated on the film 101 is put at a temperature sufficiently higher than vapor partial pressure of the surrounding substance. Thereby, since the substance accumulated on the film 101 immediately evaporates, there is no need to replace the film 101.
申请公布号 JPH07254493(A) 申请公布日期 1995.10.03
申请号 JP19940046288 申请日期 1994.03.17
申请人 NIKON CORP 发明人 KONDO HIROYUKI;KAMITAKA NORIAKI
分类号 H05G2/00;H05G1/00;(IPC1-7):H05G1/00 主分类号 H05G2/00
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