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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07254703(A)
申请公布日期
1995.10.03
申请号
JP19940044555
申请日期
1994.03.16
申请人
FUJITSU LTD
发明人
TANI KOJI
分类号
H01L21/28;H01L21/768;H01L29/423;H01L29/43;H01L29/49;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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