| 摘要 |
<p>PURPOSE:To provide a multilayer electrode wiring board, which can raise the density of the band-shaped electrode in the stator of an electrostatic actuator and also can thin the thickness of the electrostatic actuator, and makes possible high outputting and low-voltage driving, and the manufacture of a multilayer electrode wiring board simple in work process. CONSTITUTION:The multilayer electrode wiring board of an electrostatic actuator comprises a stator 1, where a plurality of band-shaped electrodes 5 having multilayer structure is wired on an electric insulating board 2, and a mover 10, which is placed on the stator and in which a resistor 15 is stacked on an electric insulating board 11, or a mover, in which a plurality of band-shaped electrodes having a multilayer structure is wired on the electric insulating board, and in this electrostatic actuator which drives the mover by floating it by the changeover of the voltage to the band-shaped electrode, the multilayer structure of the band-shaped electrode in this stator or the mover is made by the stacking into a multilayer through electric insulating layers.</p> |
