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发明名称
FORMATION OF FILM
摘要
申请公布号
JPH07252657(A)
申请公布日期
1995.10.03
申请号
JP19940045606
申请日期
1994.03.16
申请人
MITSUBISHI HEAVY IND LTD
发明人
OGURI KAZUYUKI
分类号
C23C14/02;C23C14/30;C23C16/02;C23C16/50;C23C16/511;C23F4/00;(IPC1-7):C23C16/02
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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